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Introduction to Focused Ion Beams

Introduction to Focused Ion Beams Instrumentation, Theory, Techniques and Practice

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Introduction to Focused Ion Beams

Instrumentation, Theory, Techniques and Practice

Lucille A. Giannuzzi | North Carolina State University Center for the Biology of

Science / Physics / Condensed Matter

Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior. The remainder of the book focuses on how to prepare and analyze samples using FIB and related tools, and presents specific applications and techniques of the uses of FIB milling, deposition, and dual platform techniques. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and Dual platform instruments


Publication Date: 19 November 2004
Publisher: Springer US
Imprint: Springer
ISBN-13: 9780387231167
Format: Hardback
Page Count: 357

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