Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Giannuzzi, Lucille A.

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

Details

Published by: Springer

Publication Date: 2004-11-19

Format: Hardcover

ISBN-13: 9780387231167

DOI: 10.1007/b101190

Dimensions: 235cm x155cm

Pages: 357