Handbook of Plasma Immersion Ion Implantation and Deposition

Anders, André

This is the first book to describe a family of plasma techniques used to modify the surface and near-surface layer of solid materials.

Details

Published by: Wiley-VCH

Publication Date: 2000-10-03

Format: Hardcover

ISBN-13: 9780471246985

DOI:

Dimensions: 251.5cm x172.7cm

Pages: 760.0