{"product_id":"9780792373612","title":"Microsystems","description":"\u003ch1\u003eMicrosystems\u003c\/h1\u003e \u003ch2\u003eSoh, Hyongsok T.; Guarini, Kathryn Wilder; Quate, Calvin F.\u003c\/h2\u003e \u003cp\u003e\u003cem\u003eScanning Probe Lithography\u003c\/em\u003e (SPL) describes recent  advances in the field of scanning probe lithography, a high resolution  patterning technique that uses a sharp tip in close proximity to a  sample to pattern nanometer-scale features on the sample. SPL is  capable of patterning sub-30nm features with nanometer-scale alignment  registration. It is a relatively simple, inexpensive, reliable method  for patterning nanometer-scale features on various substrates. It has  potential applications for nanometer-scale research, for maskless  semiconductor lithography, and for photomask patterning. \u003cbr\u003e  The authors of this book have been key players in this exciting new  field.  Calvin Quate has been involved since the beginning in the  early 1980s and leads the research time that is regarded as the  foremost group in this field.  Hyongsok Tom Soh and Kathryn Wilder  Guarini have been the members of this group who, in the last few  years, have brought about remarkable series of advances in SPM  lithography.  Some of these advances have been in the control of the  tip which has allowed the scanning speed to be increased from  mum\/second to mm\/second.  Both non-contact and in-contact writing  have been demonstrated as has controlled writing of sub-100 nm lines  over large steps on the substrate surface.  The engineering of a  custom-designed MOSFET built into each microcantilever for individual  current control is another notable achievement.  Micromachined arrays  of probes each with individual control have been demonstrated.  One of  the most intriguing new aspects is the use of directly-grown carbon  nanotubes as robust, high-resolution emitters. \u003cbr\u003e  In this book the authors concisely and authoritatively describe the  historical context, the relevant inventions, and the prospects for  eventual manufacturing use of this exciting new technology.\u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 2001-06-30\u003c\/p\u003e \u003cp\u003eFormat: Hardcover\u003c\/p\u003e \u003cp\u003eISBN-13: 9780792373612\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-1-4757-3331-0\u003c\/p\u003e \u003cp\u003eDimensions: 235cm x155cm\u003c\/p\u003e \u003cp\u003ePages: 197\u003c\/p\u003e ","brand":"Springer US","offers":[{"title":"Default Title","offer_id":46265615384716,"sku":"9780792373612","price":98.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9780792373612.jpg?v=1770785531","url":"https:\/\/lateknightbooks.com\/products\/9780792373612","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}