An Introduction to Surface-Micromachining

Johnstone, Robert W.; Parmaswaran, Ash

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Details

Published by: Springer

Publication Date: 2012-12-12

Format: Paperback

ISBN-10: 9781475710779

ISBN-13: 9781475710779

DOI: 10.1007/978-1-4020-8021-0

Dimensions: 235cm x155cm

Pages: 189