This book will present the theoretical and technological elements of nanosystems. Among the different topics discussed, the authors include the electromechanical properties of NEMS, the scaling effects that give these their interesting properties for different applications and the current manufacturing processes. The authors aim to provide useful tools for future readers and will provide an accurate picture of current and future research in the field.

Laurent Duraffourg is a Senior Scientist at the CEA-LETI (Minatec campus) laboratory in Grenoble, France. He is currently heading the nanophotonics and optical sensors lab of CEA-LETI.

Julien Arcamone is the MEMS Business Development Manager of CEA-LETI in Grenoble, France. He was formerly a research scientist in NEMS devices.