Microsystems and Nanosystems: Applications to Sensors and Actuators

Poletkin, Kirill

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

Details

Published by: Springer

Publication Date: 2020-11-19

Format: Hardcover

ISBN-13: 9783030589073

DOI: 10.1007/978-3-030-58908-0

Dimensions: 235cm x155cm

Pages: 174