Springer Series in Materials Science: Status and Challenges

Dabrowski, Jarek; Weber, Eicke R.

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

Details

Published by: Springer

Publication Date: 2004-05-05

Format: Hardcover

ISBN-13: 9783540204817

DOI: 10.1007/978-3-662-09432-7

Dimensions: 235cm x155cm

Pages: 490