{"product_id":"9783540204817","title":"Springer Series in Materials Science: Status and Challenges","description":"\u003ch1\u003eSpringer Series in Materials Science: Status and Challenges\u003c\/h1\u003e \u003ch2\u003eDabrowski, Jarek; Weber, Eicke R.\u003c\/h2\u003e \u003cp\u003e\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePredictive Simulation of Semiconductor Processing\u003c\/strong\u003e enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool. \u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 2004-05-05\u003c\/p\u003e \u003cp\u003eFormat: Hardcover\u003c\/p\u003e \u003cp\u003eISBN-13: 9783540204817\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-3-662-09432-7\u003c\/p\u003e \u003cp\u003eDimensions: 235cm x155cm\u003c\/p\u003e \u003cp\u003ePages: 490\u003c\/p\u003e ","brand":"Springer Berlin Heidelberg","offers":[{"title":"Default Title","offer_id":50089160933516,"sku":"9783540204817","price":215.1,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9783540204817.jpg?v=1779502589","url":"https:\/\/lateknightbooks.com\/products\/9783540204817","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}