Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
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Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
Sale price
$98.99
Regular price $109.99
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Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
Frühauf, Joachim
Details
Published by: Springer
Publication Date: 2004-10-12
Format: Hardcover
ISBN-13: 9783540221098
DOI: 10.1007/b138230
Dimensions: 235cm x155cm
Pages: 222