Springer Series in Materials Science

Hülsenberg, Dagmar; Harnisch, Alf; Bismarck, Alexander

As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its amorphous nature, the precondition for its - theoretically - direction-independent geometric structurability. Microstructuring of Glasses deals with the amorphous state, various glass compositions and their properties, the interactions between glasses and the electromagnetic waves used to modify it. Also treated in detail are methods for influencing the geometrical microstructure of glasses by mechanical, chemical, thermal, optical, and electrical treatment, and the methods and equipment required to produce actual microdevices.

Details

Published by: Springer

Publication Date: 2008-04-24

Format: Hardcover

ISBN-13: 9783540262459

DOI: 10.1007/978-3-540-49888-9

Dimensions: 235cm x155cm

Pages: 326