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This review of the properties of hydrogen in crystalline semiconductors emphasizes the ways in which hydrogen is incorporated during crystal growth and device fabrication, an area of tremendous practical importance. It is the first monograph covering the properties of hydrogen as an impurity in detail, and will be of interest to all those involved in device physics and semiconductor research and development.
Published by: Springer
Publication Date: 1992-06-29
Format: Paperback
ISBN-13: 9783540554912
DOI: 10.1007/978-3-642-84778-3
Dimensions: 235cm x155cm
Pages: 363