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Scanning Electron Microscopy

Scanning Electron Microscopy Physics of Image Formation and Microanalysis

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Springer Series in Optical Sciences

Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

P.W. Hawkes | Ludwig Reimer

Science / Chemistry / Physical & Theoretical

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Publication Date: 17 September 1998
Publisher: Springer Berlin Heidelberg
Imprint: Springer
ISBN-13: 9783540639763
Format: Hardback
Page Count: 529

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