Springer Series in Optical Sciences: Physics of Image Formation and Microanalysis

Hawkes, P.W.; Reimer, Ludwig

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Details

Published by: Springer

Publication Date: 1998-09-17

Format: Hardcover

ISBN-13: 9783540639763

DOI: 10.1007/978-3-540-38967-5

Dimensions: 235cm x155cm

Pages: 529