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Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties
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Springer Series in Materials Science
Rare-Earth Implanted MOS Devices for Silicon Photonics
Microstructural, Electrical and Optoelectronic Properties
Lars Rebohle | Wolfgang Skorupa
Technology & Engineering / Materials Science / Electronic Materials
| Publication Date: | 01 December 2012 |
| Publisher: | Springer Berlin Heidelberg |
| Imprint: | Springer |
| ISBN-13: | 9783642265587 |
| Format: | Paperback / softback |
| Page Count: | 174 |