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Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982
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Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982
Ryssel, H.; Glawischnig, H.
Details
Published by: Springer
Publication Date: 2011-12-07
Format: Paperback
ISBN-13: 9783642687815
DOI: 10.1007/978-3-642-68779-2
Dimensions: 229.0cm x152.0cm
Pages: 374.0