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Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982
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Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982
Ryssel, H.; Glawischnig, H.
Details
Published by: Springer
Publication Date: 2011-12-07
Format: Paperback
ISBN-13: 9783642691584
DOI: 10.1007/978-3-642-69156-0
Dimensions: 235.0cm x155.0cm
Pages: 558.0