Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982

Ryssel, H.; Glawischnig, H.

Details

Published by: Springer

Publication Date: 2011-12-07

Format: Paperback

ISBN-13: 9783642691584

DOI: 10.1007/978-3-642-69156-0

Dimensions: 235.0cm x155.0cm

Pages: 558.0