Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices

Hilleringmann, Ulrich

The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer’s view.

Details

Published by: Springer Vieweg

Publication Date: 2023-08-03

Format: Paperback

ISBN-13: 9783658410407

DOI: 10.1007/978-3-658-41041-4

Dimensions: 240cm x168cm

Pages: 264