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Topics in Applied Physics: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
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Topics in Applied Physics: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
Behrisch, R.
Details
Published by: Springer
Publication Date: 2014-08-23
Format: Paperback
ISBN-13: 9783662311691
DOI: 10.1007/3-540-12593-0
Dimensions: 229cm x152cm
Pages: 394