{"product_id":"9783662443941","title":"Micro and Nano Fabrication: Tools and Processes","description":"\u003ch1\u003eMicro and Nano Fabrication: Tools and Processes\u003c\/h1\u003e \u003ch2\u003eGatzen, Hans H.; Saile, Volker; Leuthold, Jürg\u003c\/h2\u003e \u003cp\u003e\u003c\/p\u003e\u003cp\u003eFor Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS\/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.\u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 2015-01-20\u003c\/p\u003e \u003cp\u003eFormat: Hardcover\u003c\/p\u003e \u003cp\u003eISBN-13: 9783662443941\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-3-662-44395-8\u003c\/p\u003e \u003cp\u003eDimensions: 235cm x155cm\u003c\/p\u003e \u003cp\u003ePages: 519\u003c\/p\u003e ","brand":"Springer Berlin Heidelberg","offers":[{"title":"Default Title","offer_id":47410797248652,"sku":"9783662443941","price":116.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9783662443941.jpg?v=1775839695","url":"https:\/\/lateknightbooks.com\/products\/9783662443941","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}