Nanofabrication: Techniques and Principles

Stepanova, Maria; Dew, Steven

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Details

Published by: Springer

Publication Date: 2011-11-09

Format: Hardcover

ISBN-13: 9783709104231

DOI: 10.1007/978-3-7091-0424-8

Dimensions: 235cm x155cm

Pages: 344