Introduction to VLSI Process Engineering

Naka, Y.; Sugawara, K.; McGreavy, C.

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

Details

Published by: Springer

Publication Date: 2012-10-21

Format: Paperback

ISBN-13: 9789401046824

DOI: 10.1007/978-94-011-1562-9

Dimensions: 235cm x155cm

Pages: 210