NATO Science Series E:

Williams, P.F.

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

Details

Published by: Springer

Publication Date: 2012-10-12

Format: Paperback

ISBN-13: 9789401064866

DOI: 10.1007/978-94-011-5884-8

Dimensions: 240cm x160cm

Pages: 613