{"product_id":"9789401064866","title":"NATO Science Series E:","description":"\u003ch1\u003eNATO Science Series E:\u003c\/h1\u003e \u003ch2\u003eWilliams, P.F.\u003c\/h2\u003e \u003cp\u003e\u003cem\u003ePlasma Processing of Semiconductors\u003c\/em\u003e contains 28  contributions from 18 experts and covers plasma etching, plasma  deposition, plasma-surface interactions, numerical modelling,  plasma diagnostics, less conventional processing applications of  plasmas, and industrial applications. \u003cbr\u003e  \u003cem\u003eAudience:\u003c\/em\u003e Coverage ranges from introductory to state of the art,  thus the book is suitable for graduate-level students seeking an  introduction to the field as well as established workers wishing to  broaden or update their knowledge.\u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 2012-10-12\u003c\/p\u003e \u003cp\u003eFormat: Paperback\u003c\/p\u003e \u003cp\u003eISBN-13: 9789401064866\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-94-011-5884-8\u003c\/p\u003e \u003cp\u003eDimensions: 240cm x160cm\u003c\/p\u003e \u003cp\u003ePages: 613\u003c\/p\u003e ","brand":"Springer Netherlands","offers":[{"title":"Default Title","offer_id":44358990561420,"sku":"9789401064866","price":296.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9789401064866.jpg?v=1771511946","url":"https:\/\/lateknightbooks.com\/products\/9789401064866","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}