Fabrication of Micro/Nano Structures via Precision Machining: Modelling, Processing and Evaluation

Zhang, Guoqing; Xu, Bin; Lu, Yanjun; To, Suet

This book introduces the cutting-edge technology of micro/nano structure fabrication from precision machining, electrical discharge machining (EDM) and precision grinding and injection molding, the contents of the presented book includes​ but not limited to the machining process, cutting tool preparation, tool path generation, and surface evaluation. This book provides a variety of feasible fabrication methods and advanced manufacturing techniques for the precision fabrication of micro/nano-structures, especially for complex micro/nano-structures. Since the book focuses on the micro/nano-structure fabrication methods including hieratical micro/nano-structures, graduate students, engineering technicians, and researchers in related areas will benefit from this book; also, someone in related application fields such as biomedicine, communication, optics may be the potential readers of this book.

Details

Published by: Springer

Publication Date: 2024-05-05

Format: Paperback

ISBN-10: 9789819913404

ISBN-13: 9789819913404

DOI: 10.1007/978-981-99-1338-1

Dimensions: 235cm x155cm

Pages: 398