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Microstereolithography and other Fabrication Techniques for 3D MEMS

Microstereolithography and other Fabrication Techniques for 3D MEMS

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Microstereolithography and other Fabrication Techniques for 3D MEMS

Vijay K. Varadan | Xiaoning Jiang | V. V. Varadan

Technology & Engineering / Electronics / Circuits / General

Eine moderne Einführung in das relativ junge Gebiet der Erzeugung winziger Strukturen, die insbesondere zur Herstellung von Mikrosensoren, Schrittmotoren und miniaturisierten Signalverarbeitungseinheiten benötigt werden. Besprochen wird eine ganze Palette von Mikrofertigungstechniken wie Laserablation und LIGA. Angesprochen werden dabei auch modernste Anwendungsgebiete wie organische Dünnschichttransistoren (TFTs), Antennen, drahtlose Telemetriesysteme und Systeme zur Signalweiterleitung.

Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USA
Vijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.


Publication Date: 06 April 2001
Publisher: Wiley
Imprint: Wiley
ISBN-13: 9780471521853
Format: Hardback
Page Count: 272
Weight (oz): 19.0

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