Theory and Application of Laser Chemical Vapor Deposition

Mazumder, J.; Kar, Aravinda

In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.

Details

Published by: Springer

Publication Date: 2013-06-11

Format: Paperback

ISBN-10: 9781489914323

ISBN-13: 9781489914323

DOI: 10.1007/978-1-4899-1430-9

Dimensions: 229cm x152cm

Pages: 396