A timely and comprehensive survey, Excimer Laser Technology reports on the current status and range of the underlying technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F₂ laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. Because it offers an effective and understandable introduction to the current and future status of the field, Excimer Laser Technology is valuable reading for laser technology students, process application researchers, engineers or anyone interested in this increasingly important area.