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Scanning Electron Microscopy Physics of Image Formation and Microanalysis
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Springer Series in Optical Sciences
Scanning Electron Microscopy
Physics of Image Formation and Microanalysis
P.W. Hawkes | Ludwig Reimer
Science / Chemistry / Physical & Theoretical
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
| Publication Date: | 01 December 2010 |
| Publisher: | Springer Berlin Heidelberg |
| Imprint: | Springer |
| ISBN-13: | 9783642083723 |
| Format: | Paperback / softback |
| Page Count: | 529 |