Structural Analysis of Point Defects in Solids provides a comprehensive introduction to the principles and techiques of modern electron paramagnetic resonance spectroscopy applied to the determination of microscopic defect structures. It informs the nonspecialist about the potential of the different methods, while the researcher faced with the task of determining defect structures will find here the necessary tools. The book will be useful for materials scientists working in semiconductor physics, laser physics, radiation damage, etc., and also for mineralogists and solid state chemists.