MatWerk: Ripple Pyrometry for Flash Lamp Annealers

Reichel, Denise

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

Details

Published by: Springer

Publication Date: 2016-01-14

Format: Paperback

ISBN-13: 9783658113872

DOI: 10.1007/978-3-658-11388-9

Dimensions: 210cm x148cm

Pages: 112