Plasma-Surface Interactions and Processing of Materials

Auciello, O.; Gras-Martí, Alberto; Valles-Abarca, Jose Antonio; Flamm, Daniel L.

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space.
The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.

Details

Published by: Springer

Publication Date: 2011-10-01

Format: Paperback

ISBN-13: 9789401073691

DOI: 10.1007/978-94-009-1946-4

Dimensions: 235.0cm x155.0cm

Pages: 558.0