This book reports on recent advances in engineering physics, MEMS, biosensors, and their emerging applications, with a special emphasis on advanced materials, micro/nano-fabrication technologies, smart materials, and integrated sensing systems. It covers a broad range of topics including engineering and engineering physics, electrical and electronic engineering, MEMS and sensors, semiconductor and microelectronic devices, biomedical engineering, digital microfluidics, renewable energy systems, computing science, simulation and modeling, embedded systems, Internet of Things, machine learning, artificial intelligence, medical physics, nuclear engineering, advanced manufacturing, robotics, automation, and intelligent systems. Based on the 7th International Conference on Engineering Physics, MEMS-Biosensors, and Applications (ICEBA 2026), held on November 2-4, 2026, in Ho Chi Minh City, Vietnam, this book serves as a timely reference for researchers, engineers, and professionals working in the interdisciplinary fields of engineering, applied physics, and advanced manufacturing technologies.